Foreword: Gordon Moore
Recent Changes in the Semiconductor Industry
Krishna Seshan
1.0 Cost of Device F abrication
2.0 Technology Trends, Chip Size, Performance, and Moore's Law
1. Deposition Technologies and Application s: Introduction and Overview
Werner Kern and Klaus K. Schue graf
1.0 Objective and Scope of this Book
2.0 Importance of Deposition Technology in Modern Fabrication Processes< BR id='CRLF'> 3.0 Classification of Deposition Technologies
4.0 Overview of Various Thin Film Deposition Technologies
5.0 Criteria for the Selection of a Deposition Technology for Speci fic Applications
6.0 Summary and Perspective for the Futu re
2. Silicon Epitaxy by Chemical Vapor Deposition
Martin L. Hammond
1.o Introduction
2. 0 Theory of Silicon Epitaxy by CVD
3.0 Silicon Epitaxy Pr ocess Chemistry
4.0 Commercial Reactor Geometries
5.0 Theory of Chemical Vapor Deposition
6.0 Proce