For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
- ISBN:
- 9783662508268
- 9783662508268
-
Category:
- Electronics engineering
- Format:
- Paperback
- Publication Date:
-
06-10-2016
- Publisher:
- Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
- Country of origin:
- Germany
- Pages:
- 519
- Dimensions (mm):
- 235x155x28mm
- Weight:
- 1.12kg
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