This book is used for a graduate course in "Design and Fabrication of Micro-electromechanical Devices (MEMS)" at the Massachusetts Institute of Technology. It is appropriate for textbook use by senior/graduate courses in MEMS, and should be a useful reference for the active MEMS professional. Each chapter is supplemented with homework problems and suggested related reading. In addition, the book is supported by a web site that will include additional homework exercises, suggested design problems and related teaching materials, and software used in the textbook examples and homework problems.
This book is used for a graduate course in "Design and Fabrication of Micro-electromechanical Devices (MEMS)" at the Massachusetts Institute of Technology. It is appropriate for textbook use by senior/graduate courses in MEMS, and should be a useful reference for the active MEMS professional. Each chapter is supplemented with homework problems and suggested related reading. In addition, the book is supported by a web site that will include additional homework exercises, suggested design problems and related teaching materials, and software used in the textbook examples and homework problems.
- ISBN:
- 9780792372462
- 9780792372462
- Category:
- Electronic devices & materials
- Format:
- Hardback
- Publication Date:
- 30-11-2000
- Publisher:
- Springer
- Country of origin:
- Netherlands
- Pages:
- 689
- Dimensions (mm):
- 235x155x38mm
- Weight:
- 2.6kg
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