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Physical and Technical Problems of SOI Structures and Devices

Physical and Technical Problems of SOI Structures and Devices

Proceedings of the NATO Advanced Research Workshop, Gurzuf, Ukraine, November 1-4, 1994

by etc. and Jean-Pierre Colinge
Hardback
Publication Date: 30/06/1995

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In this text, specialists in silicon-on-insulator technology from both East and West meet, giving the reader the chance to become acquainted with work from the former Soviet Union, hitherto only available in Russian and barely available to western scientists. Keynote lectures and state-of-the-art presentations give a wide-ranging panorama of the challenges posed by SOI materials and devices, material fabrication techniques, characterization, device and circuit issues.
ISBN:
9780792336006
9780792336006
Category:
Semi-conductors & super-conductors
Format:
Hardback
Publication Date:
30-06-1995
Publisher:
Kluwer Academic Publishers
Country of origin:
United States
Pages:
300
Weight:
0.65kg

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