This book covers one of the most important device architectures that have been widely researched to extend the transistor scaling: FinFET. Starting with theory, the book discusses the advantages and the integration challenges of this device architecture. It addresses in detail the topics such as high-density fin patterning, gate stack design, and s
- ISBN:
- 9781040221747
- 9781040221747
-
Category:
- Biomedical engineering
- Format:
- Epub (Kobo), Epub (Adobe)
- Publication Date:
-
01-02-2025
- Language:
- English
- Publisher:
- Jenny Stanford Publishing
This item is delivered digitally
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