Plasma Electronics

Plasma Electronics

by Toshiaki Makabe and Zoran Lj. Petrovic
Epub (Kobo), Epub (Adobe)
Publication Date: 29/01/2025

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Beyond enabling new capabilities, plasma-based techniques, characterized by quantum radicals of feed gases, hold the potential to enhance and improve many processes and applications. Following in the tradition of its popular predecessor, Plasma Electronics, Second Edition: Applications in Microelectronic Device Fabrication explains the fundamental

ISBN:
9781040220405
9781040220405
Category:
Physics
Format:
Epub (Kobo), Epub (Adobe)
Publication Date:
29-01-2025
Language:
English
Publisher:
CRC Press

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