Foreword to First Edition
Preface
Acknowledgme nts
A Historical Perspective
Chapter 1 A Revie w of Materials Science
1.1. Introduction
1.2. Structure
1.3. Defects in Solids
1.4. Bonds and Bands in Materials
1.5. Thermodynamics of Materials 1.6. Kinetics
1.7. Nucleation
1.8 . An Introduction to Mechanical Behavior
1.9. Conclusion
Exercises
References
Chapter 2 Vacu um Science and Technology
2.1. Introduction
2 .2. Kinetic Theory of Gases
2.3. Gas Transport and Pumping
2.4. Vacuum Pumps
2.5. Vacuum Systems
2.6. Conclusion
Exercises
ReferencesChapter 3 Thin-Film Evaporation Processes
3.1. Introduction
3.2. The Physics and Chemistry of Evaporation
3.3. Film Thickness Uniformity and Purity
3.4 . Evaporation Hardware
3.5. Evaporation Processes and Appli