Polysilicon Preparation: Polysilicon Production Technology Alternative Chlorine-Based, Semiconductor Grade, Polysilicon Feedstocks Alternative Polysilicon Reactor Selections. Crystal Growth of Silicon: Melt Growth Theory Novel Czochralski Crystal Growth Trends in Silicon Crystal Growth. Silicon Wafer Preparation: Crystal Shaping, Wafering Edge Rounding, Lapping Polishing, Cleaning In-Process Measurements. Silicon Epitaxy: Surface Preparation for Silicon Epitaxial Growth Growth of Silicon Epitaxy by CVD Dopant Incorporation Equipment for Epitaxy by CVD. Silicon Material Properties: Crystallographic Properties Electrical Properties Optical Properties Thermal and Mechanical Properties. Oxygen, Carbon and Nitrogen in Silicon: Oxygen Cluster and Precipitate Formation Mechanical Strengthening and Wafer Warpage Device Processing. Carrier Lifetimes in Silicon: Recombination Lifetimes Generation Lifetimes Role of Lifetimes on Device Currents Lifetime Measurement Techniques. Preparation and Properties of Polycrystallin-Silicon Films: Deposition Structure Oxidation Conduction Applications.
Phase Diagrams: Phase Changes Segregation Coefficient and Zone Refining Retrograde Solubility.
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