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Polymers for Microelectronics

Polymers for Microelectronics

Resists and Dielectrics

by Larry F. Thompson, C. Grant Willson and Seiichi Tagawa
Hardback
Publication Date: 01/01/1994
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Presents recent advances in chemically amplified resists for deep UV, electron beam, and X-ray advanced lithographic technologies. Discusses top surface imaging and dry development resists. Examines the fundamental chemistry of radiation-sensitive materials, including dielectric polymers for integrated circuits and interconnect systems. Valuable reading for polymer chemists, radiation chemists, and materials scientists.
ISBN:
9780841227217
9780841227217
Category:
Plastics & polymers technology
Format:
Hardback
Publication Date:
01-01-1994
Language:
English
Publisher:
American Chemical Society
Country of origin:
United States
Pages:
554
Dimensions (mm):
234x158x32mm
Weight:
0.88kg

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You can find this item in:

Electronic devices & materials Circuits & components Industrial chemistry & manufacturing technologies Physical chemistry Plastics & polymers technology Electronics engineering linguistics
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