Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication. - Provides materials scientists and engineers with an informed overview of the state-of-the-art in surface metrology - Helps readers select and design the optimized surface metrology systems and carry out proper surface metrology practices in the fabrication of micro/nano-devices and components - Assesses the best techniques for repairing micro-defects